William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Robert Manson Sawko, Malgorzata Zimon
SIAM/ASA JUQ