Eberhard Spiller
Proceedings of SPIE 1989
Multilayer mirrors have been fabricated for various angles of incidence throughout the wavelength range λ=1.5-160 Å. Reflectivity increases by more than a factor 103 over the best single-film reflectors have been obtained. Measured reflectivities are around 10% near normal incidence in the λ=45-160-Å wavelength region and above 50% near grazing incidence (grazing angle 1°-2°) for λ=1.54 Å. The required thickness control has been achieved by monitoring the reflectivity of the films in situ during the deposition.
Eberhard Spiller
Proceedings of SPIE 1989
Eberhard Spiller
Applied Physics Letters
Armin Segmüller
Thin Solid Films
Robert S. Nelson, Reuven D. Zach, et al.
Proceedings of SPIE 1989