A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Paper
Correlation of the interface reaction constant with elementary surface processes
Abstract
The experimentally determined surface rate constant is evaluated in terms of the elementary rate processes that make up the BCF Theory. If the BCF model is at all applicable, then this constant is proportional to the growth rate, regardless of the complexities of kink incorporation and of coverage effects. © 1978.
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