Bing K. Yen, Richard L. White, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The study of coverage and properties of amorphous silicon nitride (a-SiNx) overcoats deposited on magnetic disks by rf-reactive sputtering was presented. It was found by the use of x-ray photoelectron spectroscopy that amorphous silicon nitride has a low coverage-limit of ∼10 Å. It was concluded that the superior performance of a-SiNx disk overcoat may be attributed to its high hardness and dense structure.
Bing K. Yen, Richard L. White, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Robert J. Waltman, A. Campbell Ling, et al.
Journal of Physical Chemistry
Bing K. Yen, Birgit E. Schwickert, et al.
Applied Physics Letters
Paul H. Kasai, Adam Wass, et al.
Journal of Information Storage and Processing Systems