Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
We report here the synthesis and characterization of poly(amic ethyl ester) oligomers functionalized with trimethoxysilyl end-groups. The oligomers were prepared via the condensation of 1,1-bis(4-aminophenyl)-1-phenyl-2,2,2-trifluoroethane, diethyldichloromellitate and p-aminophenyltrimethoxysilane. The p-aminophenyltrimethoxysilane was used to control both molecular weight and end-group functionality. These oligomers were thermally cured to form crosslinked networks. The resulting networks possessed Tg in excess of 450°C and thermal decomposition temperatures in the proximity of 500°C. The formation of networks was confirmed by swelling studies. These oligomers offer an attractive processing alternative as low viscosity precursors to crosslinked polyimide networks. © 1997 Elsevier Science Ltd.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
T.N. Morgan
Semiconductor Science and Technology
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME