Crystallization characteristics of phase change nanoparticle arrays fabricated by self-assembly based lithography

Abstract

Phase change nanodot arrays were fabricated using self-assembly diblock copolymer template PS-b-PMMA (polystyrene-poly (methyl-methacrylate)) and studied by time resolved X-ray diffraction. The size of the nanodots was less than 15nm in diameter with 40nm spacing. This method is quite flexible regarding the patterned materials, and can be used on different substrates. The crystallization behavior of small scale phase change nanodot arrays was studied for different materials, such as Ge15Sb85, Ge 2Sb2Te5 and Ag and In doped Sb2Te. It was found that the nanodots had higher crystallization temperatures compared to their corresponding blanket films and crystallized over a broader temperature range. © 2008 Materials Research Society.