Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We study the problem of maintaining the 2-edge-, 2-vertex-, and 3-edge-connected components of a dynamic planar graph subject to edge deletions. The 2-edge-connected components can be maintained in a total of O(n log n) time under any sequence of at most O(n) deletions. This gives O(log n) amortized time per deletion. The 2-vertex- and 3-edge-connected components can be maintained in a total of O(n log2 n) time. This gives O(log2 n) amortized time per deletion. The space required by all our data structures is O(n). All our time bounds improve previous bounds.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Michael E. Henderson
International Journal of Bifurcation and Chaos in Applied Sciences and Engineering
Amir Ali Ahmadi, Raphaël M. Jungers, et al.
SICON
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003