M. Copel, R.P. Pezzi, et al.
Applied Physics Letters
Thickness interference fringes can be seen around the Bragg peaks of a variety of polycrystalline thin (10-20 nm) films using standard x-ray diffraction techniques in a conventional Bragg-Brentano geometry. In this article, thickness fringe analysis is used to investigate oxidation and roughening in thin Ir films with and without overlayers of the ferroelectric PbZrxTi1-xO3 (PZT). Changes in fringe spacing were used to determine the Ir thickness consumed by oxidation. Fringe contrast degradation (indicating roughening) was observed both after oxidation anneals (which formed a surface layer of IrO2) and after subsequent reduction anneals (which converted the IrO2 back to Ir). Film overlayers were found to have a protective effect against oxidation and roughening, as evidenced by comparison of postoxidation fringe patterns for bare and PZT-coated Ir films. Overall, our results demonstrate that thickness fringe analysis can be used as a simple, quantitative probe of processing-induced thin film thickness and morphology changes. © 2001 American Institute of Physics.
M. Copel, R.P. Pezzi, et al.
Applied Physics Letters
M. Copel, J.D. Baniecki, et al.
Applied Physics Letters
K. Ismail, F. Legoues, et al.
Physical Review Letters
K.L. Saenger, G. Costrini, et al.
ECS Meeting 2000