T. Schneider, E. Stoll
Physical Review B
A new method for improving the sensitivity of x-ray resists by chemically binding iodine to the photoactive compound (PAC) has been used. It is shown that the sensitivity increases with the number of bound iodine atoms and with the proximity of the iodine atom to the diazoquinone group. The method is believed to have general implications and that it could be adopted to other types of x-ray resists for improvement of their sensitivity to x-ray radiation.
T. Schneider, E. Stoll
Physical Review B
P. Alnot, D.J. Auerbach, et al.
Surface Science
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997