Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Initial value problems for weakly nonlinear systems of differential equations are studied here. A perturbation result is obtained which is shown to give a valid approximation to the solution. The approximation is determined by solving two associated problems, and it is especially derived for problems which have rapidly oscillating and rapidly decaying solutions. © 1976.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
George Markowsky
J. Math. Anal. Appl.
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