Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
We observe clearly resolved diffraction peaks in the scattering of argon from a 2H-W(100) surface, demonstrating the importance of quantum effects even for relatively heavy atoms. The argon diffraction peak intensities decrease exponentially with substrate temperature in a manner consistent with a surface Debye temperature of ~ 400 K. For large incidence angles, (e.g. θi = 60°), angular distributions are observed to consist of a single quasi-specular lobe which narrows substantially with incidence energy. In contrast, for θi = 30°, a rainbow distribution is found with the angular separation of the two lobes decreasing with increasing energy. These observations are discussed in terms of classical and quantum models of gas-surface scattering. © 1991.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Michiel Sprik
Journal of Physics Condensed Matter
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
K.A. Chao
Physical Review B