Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We observe clearly resolved diffraction peaks in the scattering of argon from a 2H-W(100) surface, demonstrating the importance of quantum effects even for relatively heavy atoms. The argon diffraction peak intensities decrease exponentially with substrate temperature in a manner consistent with a surface Debye temperature of ~ 400 K. For large incidence angles, (e.g. θi = 60°), angular distributions are observed to consist of a single quasi-specular lobe which narrows substantially with incidence energy. In contrast, for θi = 30°, a rainbow distribution is found with the angular separation of the two lobes decreasing with increasing energy. These observations are discussed in terms of classical and quantum models of gas-surface scattering. © 1991.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron