Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Diffraction-limited large X-Ray optics
Abstract
It is shown that the technologies required to produce large normal-incidence multilayer x-ray mirrors with diffraction-limited resolution are now available. Applications of these mirrors in x-ray astronomy and x-ray lithography are discussed. © 1994 by Academic Press, Inc.
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