Thin film technology for high and low Tc SQUIDs
W.J. Gallagher
EMBC 1990
Direct-coupled single-layer thin film SQUID magnetometers are the most reproducible high-Tc magnetometers fabricated to-date. They also serve as a good model for early identification of critical device and fabrication needs for system applications. A step-edge weak-link junction is a single-layer junction technology that allows easy lithographic definition of device position. In this article we discuss the basic technologies involved in the fabrication of single-layer SQUID devices, as well as some issues in operating such SQUIDs in an ambient, unshielded environment. © 1996.
W.J. Gallagher
EMBC 1990
W.J. Gallagher
Journal of Applied Physics
J.-M.L. Beaujour, A.D. Kent, et al.
Journal of Applied Physics
C.L. Canedy, K.B. Ibsen, et al.
Journal of Applied Physics