Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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The direct electric dipole optical selection rules between Bloch electronic states at the symmetry points of the Brillouin zone of the hexagonal close-packed lattice are calculated. Bloch wave functions transforming according to the irreducible representations of both the single and double groups are considered. © 1966 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
K.N. Tu
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