I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Progress in the state-of-the-art of the fabrication of discrete and planar monolithic structures in III-V semiconductor compounds and alloys will be presented. Devices made by diffusion and grown-diffusion techniques on Ga1-xAlxAs, GaAs1-xPx, and GaP will be discussed with emphasis on planar device structures. In addition, a comparison of the contacts from various metallurgies used on these materials will be discussed. © 1973.
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Julien Autebert, Aditya Kashyap, et al.
Langmuir