Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Discrete and planar monolithic structures of III-IV compounds and alloys
Abstract
Progress in the state-of-the-art of the fabrication of discrete and planar monolithic structures in III-V semiconductor compounds and alloys will be presented. Devices made by diffusion and grown-diffusion techniques on Ga1-xAlxAs, GaAs1-xPx, and GaP will be discussed with emphasis on planar device structures. In addition, a comparison of the contacts from various metallurgies used on these materials will be discussed. © 1973.
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