Dry etch challenges of 0.25 μm dual damascene structures

C. Smart, S.K. Reynolds, et al.

MRS Proceedings 1992

S. Cohen, T.O. Sedgwick, et al.

MRS Proceedings 1983

K. Schonenberg, Siu-Wai Chan, et al.

Journal of Materials Research

D. Edelstein

MRS Spring 1998