Surface light-induced changes in thin polymer films
Andrew Skumanich
SPIE Optics Quebec 1993
The problems of flat-ended cylindrical, quadrilateral, and triangular punches indenting a layered isotropic elastic half-space are considered. The former two are analyzed using a basis function technique, while the latter problem is analyzed via a singular integral equation. Solutions are obtained numerically. Load-deflection relations are obtained for a series of values of the ratio of Young's modulus in the layer and substrate, and for a variety of punch sizes. These solutions provide an accurate basis for the estimation of Young's modulus of thin films from the initial unloading compliance observed in indentation tests, and are specifically relevant to axisymmetric, Vicker's, and triangular indenters. The results should also be of interest in foundation engineering. © 1987.
Andrew Skumanich
SPIE Optics Quebec 1993
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011