Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This study presents uniaxial extension measurements on cis-1,4-polybutadiene networks of known junction functionality. The observed values of the reduced force from uniaxial extension measurements conform to the constrained junction theory of Flory. The reduced force intercept at 1/α = 0 is fully comprehensible in terms of the cycle rank of the network and can be calculated from chemical considerations. This holds even though the polybutadiene melt has a high-plateau modulus. Therefore, discrete topological entanglements do not contribute perceptibly to the equilibrium modulus of polybutadiene networks. © 1987, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Ming L. Yu
Physical Review B