Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A new approach to thermally stable elastomers for use between temperatures of 180°C and 275°C has been developed. Wholly aromatic poly(aryl ether ketone)s of various molecular weights have been synthesized with maleimide end groups. These structures have glass transition temperatures (Tgs) in the 150°C range, and when thermally crosslinked, they exhibited elastomeric characteristics ∼30-50°C above their Tgs (∼200°C). The moduli of the networks at 200°C were comparable to those of unreinforced poly(dimethylsiloxane) elastomers (1-2 MPa) and the elongations ranged from 200 to 300%. The poly(aryl ether ketone) elastomers showed exceptional thermal stability with little weight loss up to 490°C. The results from the chemorheology and stress relaxation measurements are discussed and compared to poly(dimethylsiloxane) networks. © 1992.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Peter J. Price
Surface Science