E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
We report the results of measurement and analysis of the electrical conductivity as a function of temperature and anneal for amorphous silicon films. The resistivity of the films between 77 and 300°K increasesc with annealing. Refractory electrodes were used. The extrapolated portions of T- 1 4 fits to the log of the conductivity give physically unreasonable parameters for the T- 1 4 formula. © 1972.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
A. Gangulee, F.M. D'Heurle
Thin Solid Films
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Eloisa Bentivegna
Big Data 2022