Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The physics of electron dynamics at surfaces and interfaces encompasses a rich variety of processes ranging from electron scattering and diffusion to electron-hole recombination and surface state and defect trapping. This review includes an overview of many of these important interactions and a detailed discussion of the experimental approaches used to study them. Particular attention is given to the surface-sensitive technique of angle-resolved photoemission carried out with nanosecond, picosecond and femtosecond laser sources which have revealed new insights into the modes of dynamical electronic properties at surfaces. A range of experiments carried out on semiconductor and metal surfaces will be described. © 1995.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.H. Kaufman, Owen R. Melroy, et al.
Synthetic Metals
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
Ming L. Yu
Physical Review B