Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have investigated the X-band electron paramagnetic resonance of stoichiometric and congruent LiNbO3 crystals grown from melts doped with ∼ 500 weight ppm Fe2O3. The analysis of the observed Fe3+ spectrum for a general direction of magnetic field is complicated due to comparable magnitudes of the Zeeman and trigonal field interactions. From the observed lines with the magnetic field parallel to the c-axis and for a temperature range of 40°C < T < 300°C the three parameters in the Hamiltonian are determined to be: g = 1.995 ± 0.005D = 3B20 = (0.168 - 5.0 × 10-5T)cm-1B40 = (1.61 × 10-3 - 1.4 × 10-6T)cm-1 These parameters were found to be independent of crystal stoichiometry. © 1972.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
J.A. Barker, D. Henderson, et al.
Molecular Physics