MICROFILE - a one-inch disk drive technology demonstration
T.C. Reiley, T.R. Albrecht, et al.
INVMTC 1996
A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design. The micro-actuator is demonstrated in a 3.5" form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities. © 1999 IEEE.
T.C. Reiley, T.R. Albrecht, et al.
INVMTC 1996
T. Hirano, T. Furuhata, et al.
IEICE Transactions on Electronics
R. Hsiao, K. Yu, et al.
JES
T. Furuhata, T. Hirano, et al.
MEMS 1991