T.C. Reiley, L.-S. Fan, et al.
Microelectronic Engineering
A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design. The micro-actuator is demonstrated in a 3.5" form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities. © 1999 IEEE.
T.C. Reiley, L.-S. Fan, et al.
Microelectronic Engineering
W.Y. Lee, J. Gao, et al.
SPIE Micromachining and Microfabrication 1997
T. Hirano, T. Furuhata, et al.
IEICE Transactions on Electronics
L.-S. Fan, H.J. Mamin
Smart Structures and Materials 1995