Dual-stage servo controller for HDD using MEMS actuator
T. Semba, T. Hirano, et al.
INTERMAG 1999
A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design. The micro-actuator is demonstrated in a 3.5" form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities. © 1999 IEEE.
T. Semba, T. Hirano, et al.
INTERMAG 1999
T. Hirano, T. Furuhata, et al.
IEICE Transactions on Electronics
W.Y. Lee, J. Gao, et al.
SPIE Micromachining and Microfabrication 1997
T. Hirano, L.-S. Fan
SPIE Micromachining and Microfabrication 1996