Lerong Cheng, Jinjun Xiong, et al.
ASP-DAC 2008
No abstract available.
Lerong Cheng, Jinjun Xiong, et al.
ASP-DAC 2008
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
M.J. Slattery, Joan L. Mitchell
IBM J. Res. Dev
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007