Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using the graph transform method, we give a geometric treatment of Pesin's invariant manifold theory. Beyond deriving the existence, uniqueness, and smoothness results by Fathi, Herman, and Yoccoz our method allows us to do four things: optimally conserve smoothness, deal with endomorphisms, prove absolute continuity of the Pesin laminations, and produce ergodic attractors. © 1989 American Mathematical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994
John R. Kender, Rick Kjeldsen
IEEE Transactions on Pattern Analysis and Machine Intelligence