William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The various estimation methods for delays in non-regenerative discrete event systems were discussed. The sequences of delays, determined from the state transitions of the generalized semi-Markov processes (GSMP), were considered. The conditions on the building blocks of a GSMP and start-vector mechanism, under which the sequence of delays is an od-regenerative process and cycle sums have finite moments, were provided.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Jonathan Ashley, Brian Marcus, et al.
Ergodic Theory and Dynamical Systems
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Andrew Skumanich
SPIE Optics Quebec 1993