Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
We use the method of probability-weighted moments to derive estimators of the parameters and quantiles of the generalized extreme-value distribution. We investigate the properties of these estimators in large samples, via asymptotic theory, and in small and moderate samples, via computer simulation. Probability-weighted moment estimators have low variance and no severe bias, and they compare favorably with estimators obtained by the methods of maximum likelihood or sextiles. The method of probability-weighted moments also yields a convenient and powerful test of whether an extreme-value distribution is of Fisher-Tippett Type I, II, or III. © 1985 Taylor & Francis Group, LLC.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Hang-Yip Liu, Steffen Schulze, et al.
Proceedings of SPIE - The International Society for Optical Engineering
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J. LaRue, C. Ting
Proceedings of SPIE 1989