John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
This work concludes the presentation of methods for evaluation of integrals required in electron-atom scattering using an analytic basis set. Methods are presented for the calculation of exchange integrals between spherical Bessel functions and exponential functions. For reasons of relative speed and applicability, six different methods are presented. Features of each are discussed and a scheme is described for selecting the most desirable method for a given case. © 1973.
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
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SPIE Advanced Lithography 2008
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