Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
This work concludes the presentation of methods for evaluation of integrals required in electron-atom scattering using an analytic basis set. Methods are presented for the calculation of exchange integrals between spherical Bessel functions and exponential functions. For reasons of relative speed and applicability, six different methods are presented. Features of each are discussed and a scheme is described for selecting the most desirable method for a given case. © 1973.
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994
Paul J. Steinhardt, P. Chaudhari
Journal of Computational Physics
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998