Evolution and expansion of SOI in VLSI technologies: Planar to 3D

SOI has enabled industry leadership in planar CMOS exemplified by both digital and analog mixed-signal applications Innovative future opportunities for SOI as Industry moves to Fully Depleted Architectures and beyond Uniformity and Variability control are at the forefront! Paradigm shift in SOI value proposition as FinFET era arrives. © 2012 IEEE.