Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
A digital imaging system that produces high image quality is not created by inspirational design alone, but evolves over time as the challenges posed by new applications are met. Our experience over the last ten years have led to a versatile high quality imaging system. In this talk, we will describe some of the system challenges encountered and the enhancements incorporated to address them.
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Mario Blaum, John L. Fan, et al.
IEEE International Symposium on Information Theory - Proceedings
Martin Charles Golumbic, Renu C. Laskar
Discrete Applied Mathematics
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994