Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
No abstract available.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
Naga Ayachitula, Melissa Buco, et al.
SCC 2007
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena