Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Robert Manson Sawko, Malgorzata Zimon
SIAM/ASA JUQ
Yue-Hong Qian, Shiyi Chen
International Journal of Modern Physics C
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994