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Modeling polarization for Hyper-NA lithography tools and masks
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K42 is an open-source, Linux-compatible, scalable operating-system kernel that can be used for rapid prototyping of operating-system policies and mechanisms. This paper reviews the structure and design philosophy of K42 and discusses our experiences in developing and using K42 in the open-source environment. © Copyright 2005 by International Business Machines Corporation.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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CoNEXT 2006
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