Conference paper
Direct phase measurements in phase-shift masks
A.P. Ghosh, D.B. Dove
Microlithography 1992
A method of fabricating of Fe/Fe-N multilayer films in the form of alternating thin films of Fe separated by very thin interlayers of Fe-N sputtered in the presence of nitrogen is described. It was found that the properties of these films depended on the thickness of Fe and Fe-N layers and the bias voltage. There is a region where the composite films have coercivity less than 1 Oe, with zero or near-zero magnetostriction. The normally high saturation magnetization of Fe with value of 20 kG was preserved.
A.P. Ghosh, D.B. Dove
Microlithography 1992
D. Manzer, R. Lane, et al.
Proceedings of SPIE 1989
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
Robert L. Melcher, P.M. Alt, et al.
IBM J. Res. Dev