Conference paper
Mechanical Modeling of the 2D Interfacial Slurry Pressure in CMP
C. Fred Higgs III, Sum Huan Ng, et al.
MRS Proceedings 2003
C. Fred Higgs III, Sum Huan Ng, et al.
MRS Proceedings 2003
G.J. Norga, A. Guiller, et al.
MRS Proceedings 2003
E. Burstein
Ferroelectrics
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics