Joseph M. Blum, J.C. Mcgroddy, et al.
IEEE JQE
Rutherford backscattering (RBS) of helium ions seems to be a feasible method for the depth analysis of fluorine. Targets of thickness between 30 and 3B24/250of calcium fluoride and magnesium fluoride were bombarded with 2.3 MeV alpha particles. The number of atoms of fluorine per cm2 as a function of the thickness of the targets and the target substrates were measured. The effect of substrate material on the measured number of atoms/cm2 of fluorine is negligible. © 1987 Elsevier Science Publishers B.V. (North-Holland Physics Publishing Division) All rights reserved.
Joseph M. Blum, J.C. Mcgroddy, et al.
IEEE JQE
J.F. Ziegler, W.K. Chu
Journal of Applied Physics
A. Lurio, J.A. Cairns, et al.
Physical Review A
J.F. Ziegler, B.L. Crowder
Applied Physics Letters