Naga Ayachitula, Melissa Buco, et al.
SCC 2007
No abstract available.
Naga Ayachitula, Melissa Buco, et al.
SCC 2007
Simeon Furrer, Dirk Dahlhaus
ISIT 2005
Guo-Jun Qi, Charu Aggarwal, et al.
IEEE TPAMI
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004