Conference paperPerformance data on new tunable attenuating PSM for 193nm and 157nm lithographyHans Becker, Frank Schmidt, et al.Photomask and Next-Generation Lithography Mask Technology 2004
PaperAdaptive solution strategy for solving large systems of p‐type finite element equationsR.B. Morris, Y. Tsuji, et al.International Journal for Numerical Methods in Engineering
PaperAiry stress function for atomic modelsPaul J. Steinhardt, P. ChaudhariJournal of Computational Physics
PaperOn the complexity of some geometric problems in unbounded dimensionNimrod MegiddoJournal of Symbolic Computation