Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We examine a simple model for a powder having multiple generations of agglomerates. Over the size range over which the generations span, this structure is shown to be fractal. An equation expressing the fractal dimension for any Euclidean dimension is derived. Copyright © 1986, Wiley Blackwell. All rights reserved
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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ADMETA 2011
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IEEE T-MTT