A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Mark W. Dowley
Solid State Communications
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010