Conference paper
Reactive ion etching processes for amorphous germanium alloys
Y. Kuo
MRS Fall Meeting 1993
Conference paper
Gas phase and gas surface kinetics of transient silicon hydride species
Abstract
This paper presents a summary of the current state of our understanding of the absolute reactivity of transient silicon hydride species, such as SiH, SiH2 and SiH3 in the gas phase and at the surface of thin films.
Related
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Conference paper
Diffusive creep in polycrystals
D.B. Laks, D. Maroudas, et al.
MRS Fall Meeting 1993
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings