R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
The use of a generalized series solution technique for analyzing semiconductor integrated-optic waveguide devices is presented. This technique can be employed to obtain TE and TM modes for any slab-waveguide structure with an arbitrary index variation, as long as the square of the index in each layer can be fitted to a polynomial function of position. The method is applied to a slab waveguide with a parabolic index profile, an AlGaAs heterostructure electrooptic phase modulator, heterostructure ridge-waveguide structures with sloped sidewalls, and an InGaAs-AlGaAs graded-index separate-confinement-heterojunction quantum-well structure.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering