Intensive optimization of masks and sources for 22nm lithography
Alan E. Rosenbluth, David O. Melville, et al.
SPIE Advanced Lithography 2009
In this paper we prove global convergence for first- and second-order stationary points of a class of derivative-free trust-region methods for unconstrained optimization. These methods are based on the sequential minimization of quadratic (or linear) models built from evaluating the objective function at sample sets. The derivative-free models are required to satisfy Taylor-type bounds, but, apart from that, the analysis is independent of the sampling techniques. A number of new issues are addressed, including global convergence when acceptance of iterates is based on simple decrease of the objective function, trust-region radius maintenance at the criticality step, and global convergence for second-order critical points. © 2009 Society for Industrial and Applied Mathematics.
Alan E. Rosenbluth, David O. Melville, et al.
SPIE Advanced Lithography 2009
Chandu Visweswariah, Ruud A. Haring, et al.
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Andrew R. Conn, Luís N. Vicente, et al.
SIAM Journal on Optimization
Andrew R. Conn, Paula K. Coulman, et al.
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems