R.B. Laibowitz, R.P. Robertazzi, et al.
Physical Review B
A design for a heater stage capable of operating in a high oxygen partial pressure is presented. Substrates attached to the stage may be heated up to 900 °C in oxygen partial pressures from 10-3 to 760 Torr. The design of the heater allows easy replacement of all parts.
R.B. Laibowitz, R.P. Robertazzi, et al.
Physical Review B
R.P. Robertazzf, B. Oh
IEEE TAS
Pong-Fei Lu, Nianzheng Cao, et al.
ISLPED 2006
W. Eidelloth, W.J. Gallagher, et al.
Applied Physics Letters