J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Nanopositioning is a key enabling technology for nanoscale metrology and manipulation. This paper details experimental studies aimed at achieving high-bandwidth nanopositioning through a combination of scanner design with excellent dynamical behavior, novel high-bandwidth position sensing, and modern control techniques. Through a combination of high stiffness/rigidity of the flexures, a low carried mass, and uncomplicated mechanical connections, an X/Y scanner is designed which has the first resonant frequencies beyond 4 kHz in both scan axes. For closed-loop operation of such fast scanners, there is a need for high-bandwidth, low-noise sensing schemes. A sensing concept based on magnetoresistance is presented that shows great potential towards providing low-noise position sensing over a very wide bandwidth. Atomic force microscopy imaging experiments of nanoscale structures are presented to illustrate the frame-per-second imaging capability of the nanopositioning system. © 2011 Elsevier Ltd. All rights reserved.
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
S.M. Sadjadi, S. Chen, et al.
TAPIA 2009
György E. Révész
Theoretical Computer Science
B.K. Boguraev, Mary S. Neff
HICSS 2000