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Phase plates in the object plane for microlithography
M. Levenson
SPIE OE/LASE 1993
Paper
High-resolution imaging by wave-front conjugation
Abstract
Conjugate-wave-front generation by degenerate four-wave mixing is used to produce images with a resolution better than 500 lines/mm with 514.5-nm light. © 1980, Optical Society of America.
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