W. Robertson, G. Arjavalingam, et al.
Applied Physics Letters
We have developed a thin-film Pt-Ir thermocouple which exhibits bulklike thermoelectric behavior up to 790°C, the highest temperature observed with thin-film pure-element thermocouples. Using a Q-switched Nd laser and a signal averaging oscilloscope, its thermal response time was measured to be 60 ns. The ease of implementation in electronic devices coupled with the reproducibility over a wide temperature range make this thin-film thermocouple well suited for monitoring instantaneous temperatures during device processing.
W. Robertson, G. Arjavalingam, et al.
Applied Physics Letters
Ho-Ming Tong, K.L. Saenger
Journal of Plastic Film & Sheeting
A. Deutsch, G. Arjavalingam, et al.
ECTC 1994
G. Arjavalingam, W. Robertson, et al.
IEE/LEOS Summer Topical Meetings 1991