Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The conventional recording of holographic images in a solid substrate may be thought of as a four-wave mixing process in which the resulting interference pattern is not transient, as in more conventional four-wave mixing experiments, but is permanent. in this paper, we describe the use of holographic techniques to obtain detailed information on solid-state photochemical processes. We describe two experiments in detail: the determination of quantum yields and the measurement of polymer chain lengths. Copyright © 1986 by The Institute of Electrical and Electronics Engineers, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME