Conference paper
Neave effect also occurs with Tausworthe sequences
Shu Tezuka
WSC 1991
No abstract available.
Shu Tezuka
WSC 1991
John S. Lew
Mathematical Biosciences
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008