Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We summarize recent experimental results of hot electron transport in the plane of a high mobility two-dimensional electron gas. We find long mean free paths, much longer than is expected theoretically. © 1990.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Frank Stem
C R C Critical Reviews in Solid State Sciences
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Micro and Nano Engineering
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