PaperGorsky relaxation and hydrogen diffusion in the metallic glass Pd80Si20B.S. Berry, W.C. PritchetPhysical Review B
PaperInternal stress and internal friction in thin-layer microelectronic materialsB.S. Berry, W.C. PritchetJournal of Applied Physics
PaperAnnealing behavior of gold absorber in x-ray masksR.E. Acosta, W.A. Johnson, et al.Microelectronic Engineering
PaperStress and thermal expansion of boron-doped silicon membranes on silicon substratesB.S. Berry, W.C. PritchetJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
