Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Novel hyperbranched poly(ε-caprolactone)s have been synthesized. The versatile synthesis utilizes AB2 macromonomers and allows the thermo-physical properties of the polymers to be tailored. The ε-caprolactone-based AB2 macromonomers were synthesized through living ring opening polymerization, using aluminum benzyloxide as the initiator. The aluminum benzyloxide initiated polymers were then functionalized with benzylidene-protected 2,2′-bis(hydroxymethyl) propionic acid and subsequently deprotected to form the α-carboxylic-ω-dihydroxy functional AB2 macromonomers. The AB2 polyesters were condensed into hyperbranched polymers through a room-temperature esterification synthesis using dicyclohexylcarbodiimide (DCC) and 4-(dimethylamino)pyridinium 4-toluenesulfonate (DPTS). All polymers were characterized by 1H NMR, SEC, and DSC. The degree of branching in the hyperbranched polymers was found, by 1H NMR, to be 0.37 ± 0.03, and to be independent of the macromonomer used. Significant flexibility exists in the new approach since the molecular weight and the type of macromonomer can be varied.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, J.S. Lew
Journal of Crystal Growth
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures